An IC-compatible polyimide pressure sensor with capacitive readout
نویسندگان
چکیده
منابع مشابه
An IC-compatible polyimide pressure sensor with c~,pacitive readout
A cupacifive diffcrcatkd pres,,ure ~en,~lw has been devek~ped. The prt~cc~,, u~ed lc, r the t;ahr~e:.tion c,f the ,~ensor it, IC-compatihle. meaning tha! the device potentially can be integrated on on,.? chip with a suitable signal-condilioning clr¢lail. ~ r,en~,or fo~ a diflerential pressure of + I bar ha.', he,ll l~lbricated lind ~e,,ted with a frequenc!.-m(~Jululed detecti~.~n circuit, and g...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1997
ISSN: 0924-4247
DOI: 10.1016/s0924-4247(97)80500-6